Effect of oscillation mode on the free-molecule squeeze-film air damping

Gang Hong, Wenjing Ye

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A 3D Monte Carlo (MC) simulation approach is developed and employed to study the effect of the oscillation mode on the squeeze-film air damping in the free-molecule regime. By tracking individual gas molecule's motion and its interaction with the resonator, the MC approach is by far the most accurate modeling approach for the modeling of squeeze-film damping in the free-molecule regime. The accuracy of this approach is demonstrated on several cases in which either analytical solutions or experimental measurements are available. It has been found that unlike the case when resonators oscillate in an unbounded domain, squeeze film damping is very sensitive to the mode shape, which implies that some of the existing modeling approaches based on rigid-resonator assumption may not be accurate when applied to model resonators oscillating at their deformed shape. ©2010 IEEE.
Original languageEnglish (US)
Title of host publication2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages370-374
Number of pages5
ISBN (Print)9781424465439
DOIs
StatePublished - Jan 2010
Externally publishedYes

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