Dynamics of V-Shaped Electrothermal MEMS-Based Resonators

Nouha Alcheikh, Hassen M. Ouakad, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

In this work, we study experimentally, analytically, and numerically the dynamics of electrothermally actuated micro-electro-mechanical V-shaped micro-beam resonators. Upon actuating the micro-beams electrothermally, we examine the various scenarios of natural frequencies crossing and avoided-crossing (veering) among the various vibration modes. The effect of various parameters is experimentally investigated on the veering and crossing including the micro-beam width and the initial rise at the mid-point. An analytical study is presented based on a reduced order model of a nonlinear Euler-Bernoulli shallow arch beam model. The dynamic behavior is also confirmed through a multi-physics finite-element model (FEM). The static and dynamic behaviors of the V-shaped micro-beams are compared against those of Arc-shaped micro-beams. [2020-0232]
Original languageEnglish (US)
Pages (from-to)1-10
Number of pages10
JournalJournal of Microelectromechanical Systems
DOIs
StatePublished - 2020

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