Dynamic pull-in phenomenon in MEMS resonators

Ali H. Nayfeh*, Mohammad Younis, Eihab M. Abdel-Rahman

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

385 Scopus citations

Abstract

We study the pull-in instability in microelectromechanical (MEMS) resonators and find that characteristics of the pull-in phenomenon in the presence of AC loads differ from those under purely DC loads. We analyze this phenomenon, dubbed dynamic pull-in, and formulate safety criteria for the design of MEMS resonant sensors and filters excited near one of their natural frequencies. We also utilize this phenomenon to design a low-voltage MEMS RF switch actuated with a combined DC and AC loading. The new switch uses a voltage much lower than the traditionally used DC voltage. Either the frequency or the amplitude of the AC loading can be adjusted to reduce the driving voltage and switching time. The new actuation method has the potential of solving the problem of high driving voltages of RF MEMS switches.

Original languageEnglish (US)
Pages (from-to)153-163
Number of pages11
JournalNonlinear Dynamics
Volume48
Issue number1-2
DOIs
StatePublished - Apr 1 2007

Keywords

  • Electric actuation
  • MEMS
  • Microbeams
  • Primary resonance
  • Pull-in
  • Resonators

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Aerospace Engineering
  • Ocean Engineering
  • Mechanical Engineering
  • Applied Mathematics
  • Electrical and Electronic Engineering

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