Dynamic analysis of mems resonators under primary-resonance excitation

Ali H. Nayfeh*, Mohammad I. Younis, Eihab M. Abdel-Rahman

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

9 Scopus citations

Abstract

We present a dynamic analysis and simulation of electrically actuated microelectromechanical systems (MEMS) resonators under primary-resonance excitation. We use a shooting technique, perturbation techniques, and long-time integration of the equation of motion to investigate the global dynamics of the resonators. We study the dynamic pull-in instability and show various scenarios and mechanisms for its occurrence. Our results show that dynamic pull-in can occur through a saddle-node bifurcation, a period-doubling bifurcation, or homoclinic tangling, depending on factors such as the initial conditions of the device and the level of the electrostatic force.

Original languageEnglish (US)
Title of host publicationProc. of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005
Subtitle of host publication20th Biennial Conf. on Mechanical Vibration and Noise
Pages397-404
Number of pages8
Volume1 A
StatePublished - 2005
Externally publishedYes
EventDETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Long Beach, CA, United States
Duration: Sep 24 2005Sep 28 2005

Other

OtherDETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
CountryUnited States
CityLong Beach, CA
Period09/24/0509/28/05

ASJC Scopus subject areas

  • Engineering(all)

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