Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode

Zhiyuan Shen, Mohammad Olfatnia, Jianmin Miao, Zhihong Wang

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral electrode induced in-plane poling and piezoelectric elongation are converted to an out-of-plane displacement due to the confined boundary condition. The influence of different drive configurations and electrode parameters on deflection has been calculated by finite element methods (FEM) using a uniform field model. Impedance and quasi-static displacement spectra of the diaphragm were measured after poling. Adouble-sided patterned electrode diaphragm can be actuated by more drive configurations than a single-sided one. Compared with a single-sided electrode drive, a double-sided out-of-phase drive configuration increases the coupling coefficient of the fundamental resonance from 7.6% to 11.8%. The displacement response of the diaphragm increases from 2.6 to 8.6nmV 1. Configurations including the electric field component perpendicular to the poling direction can stimulate shear modes of the diaphragm. © 2012 IOP Publishing Ltd.
Original languageEnglish (US)
Pages (from-to)055001
JournalSmart Materials and Structures
Volume21
Issue number5
DOIs
StatePublished - Apr 3 2012

ASJC Scopus subject areas

  • Signal Processing
  • Mechanics of Materials
  • Civil and Structural Engineering
  • Materials Science(all)
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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