Direct nanoimprinting of metal nanoparticles for nanoscale electronics fabrication

Seung H. Ko, Inkyu Park, Heng Pan, Costas P. Grigoropoulos*, Albert P. Pisano, Christine K. Luscombe, Jean Frechet

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

265 Scopus citations

Abstract

One-step direct nanoimprinting of metal nanoparticles was investigated to fabricate nano-/microscale metallic structures such as nanodot and nanowire arrays. This was done at low temperatures and pressures, utilizing the low melting temperature and viscosity of metal nanoparticle solutions. Through precise control of the fluidic properties of the nanoparticle solution and the mold design, high-quality nanoscale features with no or negligible residual layer were nanoimprinted. Nanoscale electronic devices were also demonstrated, including nanowire resistors and nanochannel organic field effect transistors with an air-stable semiconducting polymer.

Original languageEnglish (US)
Pages (from-to)1869-1877
Number of pages9
JournalNano Letters
Volume7
Issue number7
DOIs
StatePublished - Jul 1 2007

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering

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