Dipole model explaining high-k/metal gate threshold voltage tuning

P. D. Kirsch, P. Sivasubramani, J. Huang, C. D. Young, C. S. Park, K. Freeman, Muhammad Mustafa Hussain, G. Bersuker, H. R. Harris, P. Majhi, P. Lysaght, H. H. Tseng, B. H. Lee, R. Jammy

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Engineering & Materials Science