Dipole controlled metal gate with hybrid low resistivity cladding for gate-last CMOS with low Vt

Christopher L. Hinkle, Rohit V. Galatage, Richard A. Chapman, Eric M. Vogel, Husam N. Alshareef, Clive M. Freeman, Erich Wimmer, Hiroaki Niimi, Andrei V. Li-Fatou, Judy B. Shaw, James J. Chambers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Scopus citations

Fingerprint

Dive into the research topics of 'Dipole controlled metal gate with hybrid low resistivity cladding for gate-last CMOS with low Vt'. Together they form a unique fingerprint.

Physics & Astronomy