Digital holographic reflectometry

Tristan Colomb*, Stefan Krivec, Herbert Hutter, Ahmet Ata Akatay, Nicolas Pavillon, Frédéric Montfort, Etienne Cuche, Jonas Kühn, Christian Depeursinge, Yves Emery

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

37 Scopus citations

Abstract

Digital holographic microscopy (DHM) is an interferometric technique that allows real-time imaging of the entire complex optical wavefront (amplitude and phase) reflected by or transmitted through a sample. To our knowledge, only the quantitative phase is exploited to measure topography, assuming homogeneous material sample and a single reflection on the surface of the sample. In this paper, dual-wavelength DHM measurements are interpreted using a model of reflected wave propagation through a three-interfaces specimen (2 layers deposited on a semi-infinite layer), to measure simultaneously topography, layer thicknesses and refractive indices of micro-structures. We demonstrate this DHM reflectometry technique by comparing DHM and profilometer measurement of home-made SiO2/Si targets and Secondary Ion Mass Spectrometry (SIMS) sputter craters on specimen including different multiple layers.

Original languageEnglish (US)
Pages (from-to)3719-3731
Number of pages13
JournalOptics Express
Volume18
Issue number4
DOIs
StatePublished - Feb 15 2010
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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