Digital holographic microscopy for comparative metrology in micro-optics and MOEMs

Christian Depeursinge*, Florian Charrière, Frédéric Montfort

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

Digital holographic microscopy (DHM) is an imaging technique, which can be applied to the visualisation and metrology of microscopic objects. It has been established in the frame of the DISCO project that DHM can be considered as an efficient method for direct comparison of the shape or deformations of two objects. "Comparison DHM" allows a straight comparison with a gauge provided by a manufacturer or customer. The phase subtraction between ideal and actual wavefront of the object provides data equivalent to those given by a Twyman-Green or a Mach-Zehnder interferometer.

Original languageEnglish (US)
Pages (from-to)172-178
Number of pages7
JournalTechnisches Messen
Volume73
Issue number3
DOIs
StatePublished - Jul 17 2006

Keywords

  • Digital holography
  • Metrology
  • Micro-optics

ASJC Scopus subject areas

  • Instrumentation

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