Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS

Yves Emery*, Etienne Cuche, François Marquet, Nicolas Aspert, Pierre Marquet, Jonas Kuhn, Mikhail Botkine, Tristan Colomb, Frédéric Montfort, Florian Charrière, Christian Depeursinge, Patrick Debergh, Ramiro Conde

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

16 Scopus citations

Fingerprint

Dive into the research topics of 'Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy