Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS

Yves Emery*, Etienne Cuche, François Marquet, Nicolas Aspert, Pierre Marquet, Jonas Kuhn, Mikhail Botkine, Tristan Colomb, Frédéric Montfort, Florian Charrière, Christian Depeursinge, Patrick Debergh, Ramiro Conde

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

16 Scopus citations

Abstract

Digital Holographic Microscopes (DHM) enables recording the whole information necessary to provide real time nanometric vertical displacement measurements with a single image acquisition. The use of fast acquisition camera or stroboscopic acquisition mode makes these new systems ideal tools for investigating the topography and dynamical behavior of MEMS and MOEMS. This is illustrated by the investigation of resonant frequencies of a dual axis micro-mirror. This enables the definition of the linear, non-linear, and modal resocnance zones of its dynamical response.

Original languageEnglish (US)
Title of host publicationMEMS, MOEMS, and Micromachining II
Volume6186
DOIs
StatePublished - 2006
Externally publishedYes
EventMEMS, MOEMS, and Micromachining II - Strasbourg, France
Duration: Apr 3 2006Apr 4 2006

Other

OtherMEMS, MOEMS, and Micromachining II
CountryFrance
CityStrasbourg
Period04/3/0604/4/06

Keywords

  • Digital Holography Microscopy
  • MEMS
  • MOEMS
  • Real time 3D optical topography

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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