Digital holographic microscopy applied to metrology

Christian D. Depeursinge*, Florian Charrière, Anca M. Marian, Frederic Montfort, Tristan Colomb, Jonas Kühn, Etienne Cuche, Y. Emery, Pierre Marquet, Pierre J. Magistretti

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

We report on a method called Digital Holographic Microscopy (DHM) for the numerical reconstruction of digital holograms taken with a microscope. It allows for simultaneous amplitude and quantitative phase contrast imaging. The reconstruction method computes the propagation of the complex optical wavefront diffracted by the object and is used to determine the refractive index and/or shape of the object with an accuracy in the nanometer range along the optical axis. A single hologram is needed for reconstruction. The method requires the adjustment of several reconstruction parameters. The adjustment is performed automatically by using a suitable algorithm. The method has been applied to the measurement of several integrated optics devices, MOEMS, and integrated micro-optical components: microlenses.

Original languageEnglish (US)
Pages (from-to)504-512
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5457
DOIs
StatePublished - 2004
Externally publishedYes

Keywords

  • Holography
  • Microscopy
  • Phase contrast
  • Surface metrology

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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