Digital electrostatic acoustic transducer array

Armando Arpys Arevalo Carreno, David Castro, David Conchouso Gonzalez, Jürgen Kosel, Ian G. Foulds

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper we present the fabrication and characterization of an array of electrostatic acoustic transducers. The array is micromachined on a silicon wafer using standard micro-machining techniques. Each array contains 2n electrostatic transducer membranes, where “n” is the bit number. Every element of the array has a hexagonal membrane shape structure, which is separated from the substrate by 3µm air gap. The membrane is made out 5µm thick polyimide layer that has a bottom gold electrode on the substrate and a gold top electrode on top of the membrane (250nm). The wafer layout design was diced in nine chips with different array configurations, with variation of the membrane dimensions. The device was tested with 90 V giving and sound output level as high as 35dB, while actuating all the elements at the same time.
Original languageEnglish (US)
Title of host publication2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages225-228
Number of pages4
ISBN (Print)9781509019472
DOIs
StatePublished - Dec 19 2016

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