Diffractive optical elements in titanium oxide for MOEMS applications

V. K. Parashar, A. Sayah, E. Cuche, C. Depeursinge, M. A M Gijs

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

We demonstrate a new technology for the replication of titanium oxide glass micro- and nanostructures. Diffractive optical elements, like gratings, and Fresnel lenses with structural features down to 600 nm, are replicated in polymer moulds starting from liquid glass solutions. The salient features of the TiO2 microstructures are: a high refractive index (of the order of 1.95-1.99), excellent transparence in the visible range and photocatalytic activity under UV illumination, which induces super-hydrophilicity. The latter property is of importance for anti-fogging and self-cleaning properties of the optical structures.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1482-1485
Number of pages4
Volume2
ISBN (Electronic)0780377311, 9780780377318
DOIs
StatePublished - 2003
Externally publishedYes
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period06/8/0306/12/03

Keywords

  • Diffraction gratings
  • Fresnel reflection
  • Glass
  • Microstructure
  • Nanostructures
  • Optical diffraction
  • Optical polymers
  • Optical refraction
  • Optical variables control
  • Titanium

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Diffractive optical elements in titanium oxide for MOEMS applications'. Together they form a unique fingerprint.

Cite this