Development of SiC/MgO distributed bragg reflector using RF magnetron sputtering technique

M. S. Khairul Anuar*, Hariyadi Soetedjo, Mohd Sharizal Bin Alias, S. M. Sufian, T. Goh Boon, R. Richard, A. R. Saadah, Y. Mohamed Razman, A. M. Abdul Fatah

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

A Bragg mirror structure is an essential part for vertical cavity surface emission laser (VCSEL) applications. High optical reflectance at required stopband width is one of major concern by means of application requirements. For this purpose, Bragg mirrors consisting of SiC/MgO multilayers have been developed using an RF magnetron sputtering technique at room temperature. These structures have been characterized using various measurement techniques like ellipsometry, reflectance spectroscopy, Fourier transform infrared (FTIR) spectroscopy, scanning electron microscopy (SEM) and X-ray diffraction (XRD) technique. From these measurements, it was confirmed that mirror materials were deposited on the substrates. For application requirement, the DBR mirror structure fabricated using only a seven period SiC/MgO multilayered structure produced the expected stop-band at 850 nm wavelength with high reflectivity of 95%.

Original languageEnglish (US)
Title of host publicationICSE 2006
Subtitle of host publication2006 IEEE International Conference on Semiconductor Electronics, Proceedings
Pages378-381
Number of pages4
DOIs
StatePublished - Dec 1 2006
Event2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006 - Kuala Lumpur, Malaysia
Duration: Nov 29 2006Dec 1 2006

Publication series

NameIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE

Other

Other2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006
CountryMalaysia
CityKuala Lumpur
Period11/29/0612/1/06

ASJC Scopus subject areas

  • Engineering(all)

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