Development of a passive and remote magnetic microsensor with thin-film giant magnetoimpedance element and surface acoustic wave transponder

Hommood Al Rowais, Bodong Li, Cai Liang, Scott Ryan Green, Yogesh B. Gianchandani, Jürgen Kosel

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

This paper presents the development of a wireless magnetic field sensor consisting of a three-layer thin-film giant magnetoimpedance sensor and a surface acoustic wave device on one substrate. The goal of this integration is a passive and remotely interrogated sensor that can be easily mass fabricated using standard microfabrication tools. The design parameters, fabrication process, and a model of the integrated sensor are presented together with experimental results of the sensor. © 2011 American Institute of Physics.
Original languageEnglish (US)
Pages (from-to)07E524
JournalJournal of Applied Physics
Volume109
Issue number7
DOIs
StatePublished - Apr 6 2011

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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