Development of a conductive atomic force microscope with a logarithmic current-to-voltage converter for the study of metal oxide semiconductor gate dielectrics reliability

L. Aguilera, M. Lanza, A. Bayerl, M. Porti, M. Nafria, X. Aymerich

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

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Engineering & Materials Science

Physics & Astronomy