Designing a non-volatile imaging switch for mass-persistent, chemically amplified photolithography: A model study

John M. Klopp, Nicolas Bensel, Zachary M. Fresco, Jean Frechet*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

An acid catalysed rearrangement that transforms a bicyclic lactone into a phenolic carboxylic acid has been tested for potential use in chemically amplified microlithographic imaging.

Original languageEnglish (US)
Pages (from-to)2956-2957
Number of pages2
JournalChemical Communications
Volume8
Issue number24
DOIs
StatePublished - Dec 1 2002

ASJC Scopus subject areas

  • Catalysis
  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Chemistry(all)
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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