Design, Modeling, and Testing of a Bidirectional Multi-Threshold MEMS Inertial Switch

Alhammam Niyazi, Qiu Xu, Fahimullah Khan, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

Abstract

We present a MEMS inertial switch with multiple, non-latching acceleration thresholds in two directions, that consumes no power in its inactive state. The design implements a suspended proof mass, with stationary electrodes placed at different positions in its sensitive direction so that different shock-induced displacements of the proof mass will result in contact/actuation at the stationary electrodes corresponding to the applied acceleration levels. This allows for automatic acceleration-based action, as a switch, or categorization for acceleration as a binary sensor. The designs were modeled using a finite-element simulation. The device was fabricated through SOIMUMPS and then tested using a drop-table shock system. The experimental results were close to the performed simulations with acceleration thresholds of 69 g and 121 g.
Original languageEnglish (US)
Pages (from-to)113219
JournalSensors and Actuators A: Physical
DOIs
StatePublished - Nov 10 2021

ASJC Scopus subject areas

  • Instrumentation
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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