Design and prototyping of a micropropulsion system for microsatellites attitude control and orbit correction

L. Vaccari*, M. Altissimo, E. Di Fabrizio, F. De Grandis, G. Manzoni, F. Santoni, F. Graziani, A. Gerardino, F. Perennes, P. Miotti

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

30 Scopus citations

Abstract

The feasibility of a miniaturized ACS was demonstrated by using advanced microfabrication techniques. In particular, it was shown that silicon dry etching conditions can be adjusted in order to get surfaces with a roughness of 100 nm or less.

Original languageEnglish (US)
Pages (from-to)2793-2797
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume20
Issue number6
DOIs
StatePublished - Nov 2002
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Design and prototyping of a micropropulsion system for microsatellites attitude control and orbit correction'. Together they form a unique fingerprint.

Cite this