Design and Preliminary Studies of Environmentally Enhanced Water-Castable, Water-Developable Positive Tone Resists: Model and Feasibility Studies

Jennifer M. Havard, Dario Pasini, Jean M.J. Fréchet*, David Medeiros, Shintaro Yamada, C. Grant Willson

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

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