Design and fabrication of on-fiber diffractive elements for fiber-waveguide coupling by means of e-beam lithography

M. Prasciolu*, D. Cojoc, S. Cabrini, L. Businaro, P. Candeloro, M. Tormen, R. Kumar, C. Liberale, V. Degiorgio, A. Gerardino, G. Gigli, D. Pisignano, E. Di Fabrizio, R. Cingolani

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

The aim of this paper is to demonstrate that efficient fiber-waveguide optical coupling can be achieved using a multilevel phase diffractive element (PDE) fabricated directly on the top of the fiber by means of e-beam lithography. The diffractive phase element is calculated to focus and reshape the gaussian symmetric beam exiting a single-mode fiber into a desired asymmetric intensity distribution at the waveguide input plane. Phase modulation is obtained by multilevel profiling a polymeric material coated on the top of the fiber by means of a specific fabrication process including e-beam lithography and chemical etching. Experimental results obtained for fiber-waveguide coupling with a 20-μm diameter diffractive element are also presented.

Original languageEnglish (US)
Pages (from-to)169-174
Number of pages6
JournalMicroelectronic Engineering
Volume67-68
DOIs
StatePublished - Jun 2003
Externally publishedYes

Keywords

  • e-Beam lithography
  • Fiber-waveguide coupling
  • Phase diffractive elements

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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