Design and fabrication of diffractive optical elements for optical tweezer arrays by means of e-beam lithography

Enzo Di Fabrizio, D. Cojoc, L. Businaro, S. Cabrini, F. Romanato, L. Vaccari, M. Altissimo

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

Optical tweezer arrays generated by diffractive optical elements can extend the capabilities to manipulate and organize microscopic particles into complex structures, to sort them intelligently and to study collective behavior in many-body systems materials. We describe new design methods, based on iterative algorithms, to calculate phase-only diffractive optical elements able to generate planar and three-dimensional arrays of tweezers. Experimental results showing the validity of the design approach are presented for an array of eight gaussian spots.

Original languageEnglish (US)
Pages (from-to)963-969
Number of pages7
JournalMicroelectronic Engineering
Volume61-62
DOIs
StatePublished - Jan 1 2002

Keywords

  • 2D and 3D optical tweezer arrays
  • Genetic algorithms
  • Phase retrieval iterative algorithms

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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