Deposition of sol-gel derived inorganic and composite material films on InP for integrated optics

J. Liu*, Y. L. Lam, Y. C. Chan, Y. Zhou, W. X. Que, G. Tan, B. S. Ooi

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Abstract

In this paper, we present the fabrication of sol-gel derived silica based films on InP using both inorganic and composite material precursors. Thin silica films with thicknesses less than 0.5μm are achieved using an inorganic precursor by means of multiple spin coatings and rapid thermal processing (RTP) at an annealing temperature of 450°C. The cracking pattern of the inorganic silica film on InP is analyzed. Thick films are derived from composite materials by multiple spin coatings with only furnace baking at 150°C. In addition, the different properties of each type of films and their potential applications in terms of monolithic integration are discussed.

Original languageEnglish (US)
Pages (from-to)417-424
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3896
DOIs
StatePublished - Jan 1 1999
EventProceedings of the 1999 Design, Fabrication, and Characterization of Photonic Devices - Singapore, Singapore
Duration: Nov 30 1999Dec 3 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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