Creep of parylene-C film

Jeffrey Chun-Hui Lin, Peigang Deng, Gilbert Lam, Bo Lu, Yi-Kuen Lee, Yu-Chong Tai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

The glass transition temperature of as-deposited parylene-C is first measured to be 50°C with a ramping-temperature-dependent modulus experiment. The creep behavior of parylene-C film in the primary and secondary creep region is then investigated below and above this glass transition temperature using a dynamic mechanical analysis (DMA) machine Q800 from TA instruments at 8 different temperatures: 10, 25, 40, 60, 80, 100, 120 and 150°C. The Burger's model, which is the combined Maxwell model and Kelvin-Voigt model, fits well with our primary and secondary creep data. Accordingly, the results show that there's little or no creep below the glass transition temperature. Above the glass transition temperature, the primary creep and creep rate increases with the temperature, with a retardation time constant around 6 minutes. © 2011 IEEE.
Original languageEnglish (US)
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages2698-2701
Number of pages4
ISBN (Print)9781457701573
DOIs
StatePublished - Jun 2011
Externally publishedYes

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