Core-shell magnetic nanoparticles for on-chip RF inductors

Kisik Koh, Jeaneun Park, Jungwon Park, Xu Zhu, Liwei Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Scopus citations

Abstract

FeNi3 based core-shell magnetic nanoparticles are demonstrated as the magnetic core material for on-chip, radio frequency (RF) inductors. FeNi3 nanoparticles with 50-150 nm in diameter with 15-20 nm-thick SiO2 coating are chemically synthesized and deposited on a planar inductor as the magnetic core to enhance both inductance (L) and quality factor (Q) of the inductor. Experimentally, the ferromagnetic resonant frequency of the on-chip inductors based on FeNi3 core-shell nanoparticles has been shown to be over several GHz. A post-CMOS process has been developed to integrate the magnetic nanoparticles to a planar inductor and inductance enhancements up to 50% of the original magnitude with slightly enhanced Q-factor up to 1 GHz have been achieved. © 2013 IEEE.
Original languageEnglish (US)
Title of host publication2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages465-468
Number of pages4
ISBN (Print)9781467356558
DOIs
StatePublished - Jan 2013
Externally publishedYes

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