Copper thin film of alternating textures

Hanchen Huang*, H. L. Wei, C. H. Woo, Xixiang Zhang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

20 Scopus citations

Abstract

A study was performed on copper thin film of alternating textures. Copper films were deposited on a SiO2/Si(111) substrate using dc magnetron sputtering technique. A model of texture evolution during the formation of multilayers was proposed based on anisotropic elastic analysis and molecular dynamics simulations.

Original languageEnglish (US)
Pages (from-to)4265-4267
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number24
DOIs
StatePublished - Jun 16 2003

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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