Controlling dynamic pull-in escape in electrostatic MEMS

Fadi Al Saleem, Mohammad Younis

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations

Abstract

In this work, we present modeling and experimental data for controlling the dynamic pull-in and the escape-from-potential-well phenomena for a capacitive MEMS device using phase control technique. The device is actuated with a DC voltage superimposed to an AC harmonic voltage. An inevitable escape band of frequencies, where a MEMS resonator is forced to pull-in, is simulated theoretically and found experimentally. To enhance the stability of the MEMS device, a second weak AC signal with a specific phase shift is superimposed to the original AC excitation to be used as the control signal. It is found that this type of control signal can effectively shrink the escape tongue near the primary resonance of the capacitive device, thereby enhancing its stability. A numerical scheme (shooting technique) for finding periodic motion and investigating its stability using Floquet theory is used to simulate the device behavior. Comparison is then made between the simulation results and the obtained experimental data.

Original languageEnglish (US)
Title of host publication2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009
DOIs
StatePublished - 2009
Externally publishedYes
Event2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009 - Sharjah, United Arab Emirates
Duration: Mar 23 2009Mar 26 2009

Other

Other2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009
CountryUnited Arab Emirates
CitySharjah
Period03/23/0903/26/09

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

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