Control of the out-of-plane curvature in SU-8 compliant microstructures by exposure dose and baking times

D. Sameoto*, S. H. Tsang, Ian Grant Foulds, S. W. Lee, M. Parameswaran

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

30 Scopus citations

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Chemical Compounds

Engineering & Materials Science