Control of Bouncing in MEMS Switches Using Double Electrodes

Farhan Abdul Rahim, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

This paper presents a novel way of controlling the bouncing phenomenon commonly present in the Radio Frequency Microelectromechanical Systems (RF MEMS) switches using a double-electrode configuration. The paper discusses modeling bouncing using both lumped parameter and beam models. The simulations of bouncing and its control are discussed. Comparison between the new proposed method and other available control techniques is also made. The Galerkin method is applied on the beam model accounting for the nonlinear electrostatic force, squeeze film damping, and surface contact effect. The results indicate that it is possible to reduce bouncing and hence beam degradation, by the use of double electrodes.
Original languageEnglish (US)
Pages (from-to)1-10
Number of pages10
JournalMathematical Problems in Engineering
Volume2016
DOIs
StatePublished - Aug 9 2016

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