Contribution of electrodes and microstructures to the electrical properties of Pb(Zro.53Tio.47)03 thin film capacitors

H. N. Al-Shareef, A. I. Kingon, X. Chen, K. R. Bellur, O. Auciello

Research output: Contribution to journalArticlepeer-review

156 Scopus citations

Abstract

Pb(Zr0.53Tio.47)C>3 (PZT) thin film capacitors have been fabricated with four electrode combinations: Pt/PZT/Pt/Si02/Si, RuO2/PZT/Pt/Si02/Si, Ru02/PZT/Ru02/Si02/Si, and Pt/PZT/Ru02/Si02/Si. It is shown that polarization fatigue is determined largely by the electrode type (Pt vs Ru02), and microstructure has only a second-order effect on fatigue. If either the top or bottom electrode is platinum, significant polarization fatigue occurs. Fatigue-free capacitors are obtained only when both electrodes are Ru02. In contrast, the bottom electrode is found to have a major effect on the leakage characteristics of the PZT capacitors, presumably via microstructural modifications. Capacitors with bottom Ru02 electrodes show high leakage currents (J = 10”3“1CT5 A/cm2 at 1 V) irrespective of the top electrode material. Capacitors with Pt bottom electrodes have much lower leakage currents (J = 10–8A/cm2 at 1 V) irrespective of the top electrode material. At low voltage, the I-V curves show ohmic behavior and negligible polarity dependence for all capacitor types. At higher voltages, the leakage current is probably Schottky emission controlled for the capacitors with Pt bottom electrodes.

Original languageEnglish (US)
Pages (from-to)2968-2975
Number of pages8
JournalJournal of Materials Research
Volume9
Issue number11
DOIs
StatePublished - Nov 1994

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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