Contact materials for nanoelectronics

Husam N. Alshareef, Manuel Angel Quevedo Quevedo-López, Prashant Majhi

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

In this article, we review current research activities in contact material development for electronic and nanoelectronic devices. A fundamental issue in contact materials research is to understand and control interfacial reactions and phenomena that modify the expected device performance. These reactions have become more challenging and more difficult to control as new materials have been introduced and as device sizes have entered the deep nanoscale. To provide an overview of this field of inquiry, this issue of MRS Bulletin includes articles on gate and contact materials for Si-based devices, junction contact materials for Si-based devices, and contact materials for alternate channel substrates (Ge and III-V), nanodevices. © 2011 Materials Research Society.
Original languageEnglish (US)
Pages (from-to)90-94
Number of pages5
JournalMRS Bulletin
Volume36
Issue number2
DOIs
StatePublished - Feb 18 2011

ASJC Scopus subject areas

  • Materials Science(all)
  • Physical and Theoretical Chemistry
  • Condensed Matter Physics

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