Computational Fluid Dynamical Simulation of GaN Metal-Organic Vapor Phase Epitaxial Growth

Kazuhiro Ohkawa, Kota Tokuda, Akira Hirako

Research output: Contribution to journalArticlepeer-review

2 Scopus citations
Original languageEnglish (US)
Pages (from-to)520-524
Number of pages5
JournalShinku/Journal of the Vacuum Society of Japan
Volume49
Issue number9
DOIs
StatePublished - 2006
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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