Composition dependence of the work function of Ta1-xAl xNymetal gates

Husam Niman Alshareef*, K. Choi, H. C. Wen, H. Luan, H. Harris, Y. Senzaki, P. Majhi, B. H. Lee, R. Jammy, S. Aguirre-Tostado, B. E. Gnade, R. M. Wallace

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

37 Scopus citations


Dive into the research topics of 'Composition dependence of the work function of Ta<sub>1-x</sub>Al <sub>x</sub>N<sub>y</sub>metal gates'. Together they form a unique fingerprint.

Physics & Astronomy