The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within ± 0.1 eV - in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction.
- Barrier height
- Metal gate
- Work function
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering