CO2laser-induced bump formation and growth on polystyrene for multi-depth soft lithography molds

Huawei Li, Yiqiang Fan, David Conchouso Gonzalez, Ian G. Foulds

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

This paper reports the process of creating bumps on the surface of polystyrene (PS) induced by a CO2laser at low powers. The paper also outlines the procedure for growing bumps induced by multiple laser scans on the aforementioned bumps. These bumps result from the net volume gain of the laser heat-affected zone on the PS rather than from a deposition process, and the expansion of the heat-affected zone on PS was verified by measuring the hardness change using nanoindentation. The bumps have a much smoother surface than microchannels fabricated with laser cutting; depending on the laser power, they have heights ranging from hundreds of nanometers to 42m. The laser scanning speed and scan times along with this technique offer a fast and low-cost alternative for fabricating molds for multi-depth PDMS microfluidic devices. © 2012 IOP Publishing Ltd.
Original languageEnglish (US)
Pages (from-to)115037
JournalJournal of Micromechanics and Microengineering
Volume22
Issue number11
DOIs
StatePublished - Oct 19 2012

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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