Co-doping with antimony to control phosphorous diffusion in germanium

H. A. Tahini, Alexander Chroneos, R. W. Grimes, Udo Schwingenschlögl

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

In germanium, phosphorous and antimony diffuse quickly and as such their transport must be controlled in order to design efficient n-typed doped regions. Here, density functional theory based calculations are used to predict the influence of double donor co-doping on the migration activation energies of vacancy-mediated diffusion processes. The migration energy barriers for phosphorous and antimony were found to be increased significantly when larger clusters involving two donor atoms and a vacancy were formed. These clusters are energetically stable and can lead to the formation of even larger clusters involving a number of donor atoms around a vacancy, thereby affecting the properties of devices.
Original languageEnglish (US)
Pages (from-to)073704
JournalJournal of Applied Physics
Volume113
Issue number7
DOIs
StatePublished - Feb 15 2013

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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