CMOS compatible generic batch process towards flexible memory on bulk monocrystalline silicon (100)

Mohamed T. Ghoneim, Jhonathan Prieto Rojas, Arwa T. Kutbee, Amir Hanna, Muhammad Mustafa Hussain

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Today's mainstream flexible electronics research is geared towards replacing silicon either totally, by having organic devices on organic substrates, or partially, by transferring inorganic devices onto organic substrates. In this work, we present a pragmatic approach combining the desired flexibility of organic substrates and the ultra-high integration density, inherent in silicon semiconductor industry, to transform bulk/inflexible silicon into an ultra-thin mono-crystalline fabric. We also show the effectiveness of this approach in achieving fully flexible electronic systems. Furthermore, we provide a progress report on fabricating various memory devices on flexible silicon fabric and insights for completely flexible memory modules on silicon fabric.
Original languageEnglish (US)
Title of host publication8th International Conference on Electrical and Computer Engineering
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages655-658
Number of pages4
ISBN (Print)9781479941667
DOIs
StatePublished - Dec 2014

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