Chemically amplified resists based on polymer side-chain rearrangement or electrophilic crosslinking

J. M J Frechet*, S. Matuszczak, S. M. Lee, J. Fahey, C. G. Willson

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The authors have explored a large number of alternate designs for imaging systems based on acid catalyzed electrophilic aromatic processes. These include the use of new latent crosslinkers as well as new activated aromatic moieties, the development of an image reversal process forpositive tone imaging with dry development, the design of an image reversal scheme involving the in-situ photogeneration of base, and the achievement of dual-tone (positive and negative) imaging through electrophilic aromatic rearrangements. This paper describes these approaches which illustrate the versatility of the overall design.

Original languageEnglish (US)
Title of host publicationPhotopolymers
Subtitle of host publicationPrinciples - Processes and Materials
Editors Anon
PublisherPubl by Soc of Plastics Engineers
Pages31-40
Number of pages10
StatePublished - 1991
Externally publishedYes
Event9th International Technical Conference on Photopolymers - Ellenville, NY, USA
Duration: Oct 28 1991Oct 30 1991

Other

Other9th International Technical Conference on Photopolymers
CityEllenville, NY, USA
Period10/28/9110/30/91

ASJC Scopus subject areas

  • Engineering(all)

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