L'AMPLIFICATION CHIMIQUE APPLIQUEE AU DEVELOPPEMENT DE POLYMERES UTILISABLES COMME RESINES DE LITHOGRAPHIE.

Translated title of the contribution: Chemical Amplification in the Design of Polymers for Resist Application.

C. Grant Willson*, Hiroshi Ito, J. M J Frechet

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations
Translated title of the contributionChemical Amplification in the Design of Polymers for Resist Application.
Original languageFrench
Title of host publicationUnknown Host Publication Title
PublisherComite du Colloque Int sur la Microlithographie
Pages261
Number of pages1
StatePublished - 1982
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)

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