CHEMICAL AMPLIFICATION IN THE DESIGN OF POLYMERS FOR RESIST APPLICATIONS.

C. Grant Willson*, Hiroshi Ito, Jean M J Frechet, Frank Houlihan

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

38 Scopus citations
Original languageEnglish (US)
Title of host publicationUnknown Host Publication Title
PublisherIUPAC
Pages448
Number of pages1
StatePublished - 1982
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)

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