Characterization of microlenses by digital holographic microscopy

Florian Charrière*, Jonas Kühn, Tristan Colomb, Frédéric Montfort, Etienne Cuche, Yves Emery, Kenneth Weible, Pierre Marquet, Christian Depeursinge

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

218 Scopus citations

Abstract

We demonstrate the use of digital holographic microscopy (DHM) as a metrological tool in micro-optics testing. Measurement principles are compared with those performed with Twyman-Green, Mach-Zehnder, and white-light interferometers. Measurements performed on refractive microlenses with reflection DHM are compared with measurements performed with standard interferometers. Key features of DHM such as digital focusing, measurement of shape differences with respect to a perfect model, surface roughness measurements, and optical performance evaluation are discussed. The capability of imaging nonspherical lenses without any modification of the optomechanical setup is a key advantage of DHM compared with conventional measurement tools and is demonstrated on a cylindrical microlens and a square lens array.

Original languageEnglish (US)
Pages (from-to)829-835
Number of pages7
JournalApplied Optics
Volume45
Issue number5
DOIs
StatePublished - Feb 10 2006

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Characterization of microlenses by digital holographic microscopy'. Together they form a unique fingerprint.

Cite this