Characterization of imprinted gratings based on transparent materials by transmission scatterometry

David Pietroy, Issam Gereige, Cécile Gourgon

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

Transmission scatterometry is studied as a characterization tool for gratings nanoimprinted in a resist layer spincoated on the top of a transparent substrate. In this case, the larger part of the incident signal is transmitted which can make the reflection analysis harder. Although the backward reflections in the substrate induce an error which is difficult to correct, results are shown to be in good agreement with SEM measurements and reflection mode scatteromerty. © 2013 Elsevier B.V. All rights reserved.
Original languageEnglish (US)
Pages (from-to)48-51
Number of pages4
JournalMicroelectronic Engineering
Volume106
DOIs
StatePublished - Jun 2013

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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