Characteristics of rotating arc for CF4 removal

Kwan Tae Kim, Young Hoon Song*, Min Suk Cha, Dae Hoon Lee, Dong Hyun Kim

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

Characteristics of CF4 treatment process with a rotating arc are investigated under different thermal and non-thermal plasma conditions. To generate high temperature or non-thermal plasma conditions, a rotating arc reactor is operated with various operating conditions, which are species of carrier gases, flow rates, and input power. Test results reveal that that high temperature conditions caused by CH4 and O2 addition is an effective approach for increasing CF4 removal efficiency. Non-thermal plasma conditions, however, do not result in noticeable increase in CF4 removal efficiencies despite supplying O2 or Ar gases into the process.

Original languageEnglish (US)
Pages (from-to)412-422
Number of pages11
JournalInternational Journal of Environment and Waste Management
Volume2
Issue number4-5
DOIs
StatePublished - 2008
Externally publishedYes

Keywords

  • Electro-chemical
  • Non-thermal plasma
  • Perfluorocarbons
  • PFCs
  • Rotating arc
  • Thermo-chemical
  • Treatment

ASJC Scopus subject areas

  • Environmental Engineering
  • Waste Management and Disposal

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