This paper presents a capacitive sensor for monitoring parallel microfluidic droplet generation. The great electric permittivity difference between common droplet microfluidic fluids such as air, oil and water (ϵoil ≈ 2–3 and ϵwater ≈ 80.4), allows for accurate detection of water in oil concentration changes. Capacitance variations as large as 10 pF between a channel filled with water or dodecane, are used to continuously monitor the output of a parallelization system producing 150 µl/min of water in dodecane emulsions. We also discuss a low cost fabrication process to manufacture these capacitive sensors, which can be integrated to different substrates.
|Original language||English (US)|
|Title of host publication||2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)|
|Publisher||Institute of Electrical and Electronics Engineers (IEEE)|
|Number of pages||4|
|State||Published - Dec 19 2016|