Breaking the Doping Limit in Silicon by Deep Impurities

Mao Wang, A. Debernardi, Y. Berencén, R. Heller, Chi Xu, Ye Yuan, Yufang Xie, R. Böttger, L. Rebohle, W. Skorupa, M. Helm, S. Prucnal, Shengqiang Zhou

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Physics & Astronomy