BEOL test chip for rapid technology and process integration debugging

Y. C. Ee, J. B. Tan, B. C. Zhang, F. Zhang, Y. L. Yao, P. K. Tan, C. S. Chee, C. K. Koo, Xianbin Wang, D. K. Sohn, T. Fu, L. C. Hsia, A. Inani, N. Akiya, L. Yuan, A. Agarwal

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    Engineering & Materials Science