Axially Modulated Clamped-Guided Arch Resonator for Memory and Logic Applications

Md Abdullah Al Hafiz, Sherif Adekunle Tella, Nouha Alcheikh, Hossein Fariborzi, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

We experimentally demonstrate memory and logic devices based on an axially modulated clamped-guided arch resonator. The device are electrostatically actuated and capacitively sensed, while the resonance frequency modulation is achieved through an axial electrostatic force from the guided side of the clamped-guided arch microbeam. We present two case studies: first, a dynamic memory based on the nonlinear frequency response of the resonator, and second, a reprogrammable two-input logic gate based on the linear frequency modulation of the resonator. These devices show energy cost per memory/logic operation in pJ, are fully compatible with CMOS fabrication processes, have the potential for on-chip system integration, and operate at room temperature.
Original languageEnglish (US)
Title of host publicationVolume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
PublisherASME International
ISBN (Print)9780791858165
DOIs
StatePublished - Nov 3 2017

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