Analysis of TMGa/NH 3/H 2 reaction system in GaN-MOVPE growth by computational simulation

A. Hirako*, S. Koiso, K. Ohkawa

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Fingerprint

Dive into the research topics of 'Analysis of TMGa/NH 3/H 2 reaction system in GaN-MOVPE growth by computational simulation'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy